Product Benefits

• Fast full TFT array tests of a-Si LCD panels
• Sure defect detection capability with short TACT
• High test sensitivity improves process and product quality
• Efficient process feedback and productivity improvement

General Features

• Number of test heads : Up to four
• Number of channels: 7,680 data and 2,560 gate
• Number of multiple test sites : Up to eight

Typical Evaluation Items in Line

• Opens, Shorts
• Ion, Ioff, and Vth
• Cs and Charge in pixel